Waferpedia

Comparison ledger

0010-22161 High EFF RF Matchversus631F

Applied Materials 0010-22161 High EFF RF Match, MKS 631F, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
631FMKS
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchMKS 631F
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Full Scale Range—1 to 1000 Torr (1.33×10² to 1.33×10⁵ Pa)[3]
Accuracy—0.50% of Reading[3]
Temperature (Internal Heating)—150°C, 200°C[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]api.p1.mks.comapi.p1.mks.com