Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Leybold Turbovac 1000 C Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Leybold Turbovac 1000 C Turbomolecular Vacuum |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Power In | — | 47V, AC 3,5A, 600 Hz[3] |
| Power Out | — | 36.000 min-1[3] |
| Frequency | — | 600 Hz[4] |
| Pumping Speed | — | 1000 L/s for N2[4] |
| Compression Ratio | — | > 10ª for N2 / H2[4] |
| Inlet Flange | — | ISO-160 / ISO-200 KF[4] |
| Foreline Flange | — | KF-25 or KF-40[4] |
| Operating Speed | — | ~ 36 000 rpm[4] |
| Cooling | — | water[4] |
| Pumping speed | — | 1000 L/s (N2)[4] |
| Compression ratio | — | > 10ª for N2 / H2[4] |
| Power input | — | 47V AC, 3.5A, 600 Hz[3] |
| Power output | — | 36,000 min-1[3] |