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0010-22161 High EFF RF MatchversusSEZ SP 4300 Single Wafer Processing

Applied Materials 0010-22161 High EFF RF Match, Lam Research SEZ SP 4300 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchLam Research SEZ SP 4300 Single Wafer Processing
Specifications
MakeApplied Materials[1]Lam / SEZ[4]
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Product Type—Single wafer wet chemical processor / spin etcher[3]
Manufacturer (stated)—SEZ[3]
Wafer Size—300 mm (12 in)[3]
Number of Chambers—4[3]
Number of Chemical Handling Cabinets (CHC)—2 (internal)[3]
Number of Load Ports—4 FOUP[3]
Year of Manufacture (this unit)—2003[3]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]ptwsingapore.comptwsingapore.com
  4. [4]Equipment inventory listing