Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusHRS-600HS-25

Applied Materials 0010-22161 High EFF RF Match, Espec HRS-600HS-25, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEspec
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEspec HRS-600HS-25
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Category—Rapid-rate thermal cycle chamber[3]
Temperature & humidity range—−70℃ to +180℃ / 20%rh to 98%rh[3]
Temperature change rate—25℃/min[3]
Interior dimensions (W×H×D)—1000×1000×600 mm[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]espec.co.jpespec.co.jp