Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards IGX 600 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | IGX 600 M VacuumEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards IGX 600 M Vacuum |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[3] | — |
| Model | 0010-22161[3] | — |
| Description | HTESC PH 1 REV A[4] | — |
| Condition | Used[4] | — |
| Stock Number | BM6628[4] | — |
| Product type | — | Dry pump[5] |
| Vintage | — | 2008[6] |
| Peak speed | — | 600 m3 h-1 (365 cfm, 10,333 L/min)[2] |
| Ultimate pressure | — | 7.00 x 10^-4 mbar (5.25 x 10^-4 Torr, 0.07 Pa)[2] |
| Power at 700 Torr exhaust ultimate | — | 1.6 kW[2] |
| Active Utility Controller power | — | 0.05 kW[2] |
| Water inlet | — | 2 slm[2] |
| Nitrogen | — | 0 slm[2] |
| Footprint excluding exhaust | — | 0.20 m2[2] |
| Weight | — | 220 kg (485 lbs)[2] |
| Inlet connection | — | ISO100[2] |
| Outlet connection | — | NW25[2] |
| Exhaust connection | — | KF25[5] |
| Noise at ultimate | — | < 55 dB(A)[2] |
| Input voltage options | — | 200 V-230 V 50/60 Hz; 380 V-460 V 50/60 Hz[1] |
| Pumping speed | — | 600 m³/h (365 CFM)[2] |
| Power consumption (at 700 Torr exhaust) | — | 1.6 kW[2] |
| AUC power | — | 0.05 kW[2] |
| Water inlet flow | — | 2 slm[2] |
| Nitrogen flow | — | 0 slm[2] |
| Footprint (excluding exhaust) | — | 0.20 m²[2] |
| Noise level (at ultimate) | — | < 55 dB(A)[2] |