Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards IGX 1000 N, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | IGX 1000 NEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards IGX 1000 N |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | — |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Pumping speed | — | 800 m³/h (471 CFM)[1] |
| Ultimate pressure | — | 1.00×10⁻⁴ mbar (7.5×10⁻⁴ Torr)[1] |
| Inlet connection | — | ISO100[4] |
| Exhaust connection | — | NW25 (KF25)[1] |
| Weight | — | 230 kg (507 lbs)[1] |
| Motor power | — | 2.1 hp[1] |
| Power at ultimate (700 Torr exhaust) | — | 1.6 kW[1] |
| AUC (Active Utility Controller) power | — | 1.05 kW[1] |
| Cooling water flow | — | 2 slm[1] |
| Nitrogen purge flow | — | 4 or 14 slm[1] |
| Footprint (excluding exhaust) | — | 0.20 m²[1] |
| Noise at ultimate | — | < 55 dB(A)[1] |