Comparison ledger
Applied Materials 0010-21246 Part, Semitool SST 421 Spray Solvent, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | SST 421 Spray SolventSemitool |
|---|---|---|
| OEM | Applied Materials | Semitool |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Semitool SST 421 Spray Solvent |
| Specifications | ||
| Voltage | — | 400 Vac / 35 A[1] |
| Model | — | SST-421[2] |
| Manufacturer | — | Semitool[3] |
| Description | — | Spray Solvent Tool[4] |
| Tool type | — | Automated Spray Solvent Tool (SST)[2] |
| Process role | — | Batch Solvent Processor for Wafer Cleaning[2] |
| Wafer size | — | 8"/200mm[2] |
| Number of tanks | — | 4[6] |
| Number of heated tanks | — | 2[6] |
| Single chamber | — | Yes[2] |
| Rotor included | — | 1 rotor included[2] |
| OEM | — | Semitool[3] |
| Process type | — | Batch solvent processor for wafer cleaning[2] |
| Process applications | — | Polymer removal, resist stripping, wafer cleaning, metal lift-off[2] |
| Max wafer size | — | 8"/200mm wafers[2] |
| Max substrate size | — | 8"/200mm[5] |
| Chambers | — | Single chamber[2] |
| Rotor | — | 1 rotor included (select size at time of order)[2] |
| Tanks | — | 4 stainless steel tanks (2 heated, 2 ambient)[2] |
| Operation | — | Automated spray solvent tool[2] |