Waferpedia

Comparison ledger

0010-21246 PartversusCentura 5200 DXZ

Applied Materials 0010-21246 Part, Applied Materials Centura 5200 DXZ, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
Centura 5200 DXZApplied Materials
OEMApplied MaterialsApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura 5200 DXZ
Cited variants—
  • Centura 5200 DxZ PECVD[1]
  • Centura 5200 DxZ SACVD[2]
Specifications
Wafer Size—200 mm[1]
Process Type (available)—PECVD, SACVD[1]
Number of Chambers (SACVD variant)—3[2]
Chemistry (SACVD variant)—TEOS[2]
OEM—Applied Materials[3]
Model—Centura 5200 DXZ[3]
Description—PECVD (Chemical Vapor Deposition)[1]
Version—200 mm[1]
Vintage—01.06.1997[2]
Sources (3)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]Equipment inventory listing