Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi TM 3030 Tabletop, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | TM 3030 TabletopHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2013– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi TM 3030 Tabletop |
| Cited variants | — | |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[2] | — |
| Voltage | — | 100 - 240 V, 50 / 60 Hz[3] |
| Power | — | 500 VA, 1 Phase[3] |
| Accelerating voltage | — | 5 kV, 15 kV[4] |
| Magnification | — | 15x to 30,000x (with digital zoom 2x, 4x)[4] |
| Maximum specimen diameter | — | 70 mm[4] |
| Maximum specimen thickness | — | 50 mm[4] |
| Stage movement | — | X = 35 mm, Y = 35 mm[4] |
| Dimensions (main unit, manual stage) | — | 330 mm (W) × 606 mm (D) × 565 mm (H)[4] |
| Weight (main unit, manual stage) | — | 63 kg[4] |
| Weight (diaphragm pump) | — | 4.5 kg[4] |
| Power supply | — | 100–240 V, 50/60 Hz, 500 VA[3] |
| Detector | — | High-sensitivity backscattered electron detector (4-segment)[1] |
| Observation modes | — | Standard, Charge-up reduction[1] |
| Starting time | — | 3 minutes[1] |
| Operating system | — | Windows 7 Professional (32/64 bit)[4] |
| Magnification Range | — | 15x - 30,000x (with digital zoom 2x, 4x)[4] |
| Maximum Specimen Size | — | 70 mm diameter, 50 mm thickness[4] |
| Electron Gun | — | Pre-centered cartridge filament[1] |
| Detector Type | — | High-sensitivity 4-segment backscattered electron detector[1] |
| Vacuum System | — | Turbo molecular pump 30 L/s, diaphragm pump 1 m³/h[1] |
| Power Supply | — | AC 100-240 V, 500 VA, 50/60 Hz[3] |
| Dimensions (Main Unit) | — | 330(W) × 606(D) × 565(H) mm[4] |
| Weight (Main Unit) | — | 63 kg (manual stage)[4] |
| Operating System | — | Windows 7 Professional[4] |
| Image Data Recording Pixels | — | 1280×960 pixels (max.) / 640×480 pixels[1] |
| Image Format | — | BMP, TIFF, JPEG[1] |
| Manufacturer | — | Hitachi[3] |
| Model | — | TM 3030 Tabletop[3] |
| Equipment type | — | Tabletop microscope[3] |
| Electron microscope type | — | SEM[4] |
| Sample size | — | Up to 70 mm in diameter and 50 mm thickness[4] |
| EDX integration | — | Integrable with an EDX unit[4] |
| EDX optional packages | — | SwiftED3000 or Quantax70[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →