Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, FEI Quanta 600 FEG, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | FEI |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | FEI Quanta 600 FEG |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[2] | — |
| Resolution in ESEM mode | — | 1.5 nm[1] |
| Operating pressure range | — | 6 x 10^-4 Pa to ~1000 Pa[1] |
| Detector | — | Special wet STEM detector[1] |
| Heating and cooling stage temperature range | — | 20-1000°C[1] |
| Manipulators | — | Dual Kleindiek nano-manipulators[1] |
| Micro-droplet injection system | — | Included for electrical and mechanical measurements[1] |
| Gas injection systems | — | For platinum and gold e-beam deposition[1] |
| EDS | — | EDAX Energy Dispersive x-ray spectrometer[1] |
| EBSD | — | Electron backscatter diffraction detector available[1] |
| Resolution (ESEM mode) | — | 1.5 nm[1] |
| Pressure range | — | 6 x 10^-4 Pa to ~1000 Pa[1] |
| Temperature range (heating/cooling stages) | — | 20-1000°C[1] |
| Wet STEM detector | — | Present[1] |
| Dual Kleindiek nano-manipulators | — | Present[1] |
| EDS (Energy Dispersive x-ray spectrometer) | — | EDAX[1] |
| EBSD (Electron backscatter diffraction detector) | — | Present[1] |
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