Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Tokyo Electron TE 8500 PESC Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | TE 8500 PESC DryTokyo Electron |
|---|---|---|
| OEM | Applied Materials | Tokyo Electron |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Tokyo Electron TE 8500 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 1 chamber[3] |
| Gas | — | CF4, CHF3, He[3] |
| Process type | — | Dry etcher[4] |
| Number of chambers | — | 1 chamber[3] |
| Process application | — | Oxide etch with end point[3] |
| Process gases | — | CF4, CHF3, He[3] |
| Operating system (OS) | — | EPROM based system[3] |
| Loaders (LD) | — | 2ea, Fortrend[3] |
| Pumps | — | 2ea, Ebara, A30W[3] |
| Listed unit vintage | — | 1996[3] |
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