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0010-16392 ESC AssemblyversusScientific FEI OptiFIB Taipan G 2 FIB

Applied Materials 0010-16392 ESC Assembly, Thermo Fisher Scientific FEI OptiFIB Taipan G 2 FIB, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
OEMApplied MaterialsThermo Fisher
CategoryEtchEtch
Wafer size——
Process node—7 nm
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyThermo Fisher Scientific FEI OptiFIB Taipan G 2 FIB
Cited variants—
  • OptiFIB Taipan G 2[1]
  • 7 nm CE Upgrade[2]
Specifications
OEMApplied Materials[3]—
Model0010-16392[3]—
TypeESC Assembly[3]Focused Ion Beam (FIB)[1]
Wafer Size300 mm[4]—
Electrode ConfigurationDual[4]—
Configuration—7 nm[1]
Full Load Amps—24 A[1]
Full Load—24 A[5]
Largest Load—13 A[5]
Acceleration Voltage—0.5-30 kV[7]
Beam Current Range—250 fA up to 20 nA[7]
Stage Travel (X,Y,Z)—75 x 75 x 20 mm[7]
Beam Drift Stability—~4 nm/min (drift)[7]
Conductor Resistivity (for deposit)—≤ 200 µΩ·cm[7]
Insulator Resistivity—≥ 1e15 µΩ·cm[7]
FIB Column / Type—Ion-photon Coaxial Taipan Column[7]
Image Resolution—~ 2.7 nm at 250 fA, 30 kV (graphite sample)[7]
Node capability—7 nm[5]
Electrical requirements—200-240 VAC, Single Phase, 50/60 Hz[1]
Full load current—24 A[1]
Largest load current—13 A[5]
Vintage year—2015[1]
Tool type—Focused Ion Beam (FIB)[1]
Node—7 nm[1]
Power—200-240 VAC[1]
Phase—Single Phase[1]
Frequency—50/60 Hz[1]
Upgrade—CE Upgrade[5]
Upgrade note—Upgrade from 10 nm G1 to 7 nm G2[2]
Condition note—Without HDD / SSD[1]
Electrical rack note—Tapian Electrical Rack[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]spwindustrial.comspwindustrial.com
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing