Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Nordson March AP 300, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | March AP 300Nordson |
|---|---|---|
| OEM | Applied Materials | Nordson |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Nordson March |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 100-240 V[3] |
| Phase | — | 1 Phase[3] |
| Power | — | 2 kVA[3] |
| RF Generator | — | 300 Watt, 13.56 MHz[3] |
| Gas delivery | — | 2 gas sources can be plumbed into system[3] |
| MFCs | — | Built in MFCs[3] |
| Vacuum pump | — | Vacuum pump included[3] |
| Control | — | Advanced PLC Controllers, Touch Screen, GUI Software Interface[3] |
| Safety | — | Full System Safety Enclosure[3] |
| Automated tuning | — | Integrated RF Automated Tuning Network[3] |
| Vintage | — | 2010[3] |
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