Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research SEZ SP 203 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | SEZ SP 203 SpinLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research SEZ SP 203 |
| Specifications | ||
| OEM | Applied Materials[1] | Lam Research[5] |
| Model | 0010-16392[1] | SEZ SP 203 Spin[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 50/60 Hz[3] |
| Voltage | — | 400 VAC[3] |
| Max. Current | — | 32 A[3] |
| Breaking Capacity | — | 10.000 AIC[3] |
| Power | — | 400V, 50 Hz, 3-Phase[4] |
| Phase | — | ENI VL-400 Phase Shift Controller[4] |
| Roughing Pump Code | — | A532-80-905[4] |
| Category | — | Etch[5] |
| Tool type | — | Spin etcher[5] |
| Wafer size | — | 150mm[6] |
| Vintage | — | 1999[6] |
| Process pump status | — | Process pump in one chemical cabinet (sub tool) has malfunction[3] |
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