Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 590, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 590Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research 590 |
| Specifications | ||
| OEM | Applied Materials[1] | Lam Research[3] |
| Model | 0010-16392[1] | 590[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 208V[3] |
| Wafer size | — | 6 inch[3] |
| RF frequency | — | 13.56 MHz[5] |
| Pressure | — | 2.8 Torr[5] |
| Gap | — | 0.38 cm[5] |
| Power (low) | — | 450 W[5] |
| Power (high) | — | 850 W[5] |
| Category | — | Etcher[3] |
| Power | — | 208V[3] |
| Plasma recipe entry | — | CF4+CHF3+He (90:30:120 sccm)[5] |
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