Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Axcelis RapidStrip 210 ES, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | RapidStrip 210 ESAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2007 Date of manufacture |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Axcelis RapidStrip 210 ES |
| Specifications | ||
| OEM | Applied Materials[1] | Axcelis[3] |
| Model | 0010-16392[1] | 3kW switchmode powergen[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Part Number | — | 1080-6037[3] |
| Software Version | — | 1.8.7.0.06[3] |
| Configuration | — | System On-Line[3] |
| System Type | — | RapidStrip 210 ES[3] |
| Number of Cassettes | — | 2[3] |
| Load Type | — | Standard[3] |
| Install Type | — | Through-the-Wall[3] |
| Robot Type | — | Brooks[3] |
| Endpoint Detection Type | — | Monochromator[3] |
| Throttle Valve | — | MKS[3] |
| Foreline Valve | — | VAT[3] |
| Manufacturer | — | Matrix[3] |
| Category | — | Etch[4] |
| Wafer size | — | 8 inch[3] |
| Cooling station | — | Present[3] |
| SECS/GEMS | — | Yes[3] |
| Ozone / microwave generator manufacturer | — | Matrix[3] |
| Ozone / microwave generator model | — | 3kW switchmode powergen[3] |
| Pump | — | IQDP 80[3] |
| Mechanical booster | — | QMB1200[3] |
| System status | — | System on-line[3] |
| CE mark | — | Certified[3] |
| Can produce wafers as-is | — | Yes[3] |
| All cables present | — | Yes[3] |
| System On-Line | — | Yes[3] |
| CE Mark Certified | — | Yes[3] |
| Cooling Station | — | Yes[3] |
| Date of Manufacture | — | 2007-12-31[5] |
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