Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura 5200 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Centura 5200 DryApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials Centura 5200 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 50/60 Hz[3] |
| Voltage | — | 208V[3] |
| Process type | — | Dry etching[3] |
| Wafer size | — | 8 inch[3] |
| Wafer size (version) | — | 200 mm[4] |
| Electrical: frequency | — | 50/60 Hz[3] |
| Electrical: voltage | — | 208V[3] |
| Electrical: current | — | 240A[3] |
| Chamber configuration | — | 2 Chamber dps Metal, 2 Chamber asp+[4] |
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