Waferpedia

Comparison ledger

0010-14300 Magnet AssyversusEHPI 500 Medium Current

Applied Materials 0010-14300 Magnet Assy, Varian EHPI 500 Medium Current, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2001 Vintage
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyVarian EHPI 500
Specifications
ConfigurationP4 Magnet Assy, IMP[1]5 Wire[2]
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Phase—3 Phase[2]
OEM—Varian[2]
Model—EHPI 500[2]
Tool type—Medium current implanter[3]
Application—Ion implantation[3]
Wafer size—8 inch[2]
Power—3 Phase[2]
Electrical configuration—5 Wire[2]
Line frequency—50/60 Hz[2]

Plan your fab

Building a Ion Implantation process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com