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Comparison ledger

0010-14300 Magnet AssyversusNV GSD HE

Applied Materials 0010-14300 Magnet Assy, Axcelis NV GSD HE, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
NV GSD HEAxcelis
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size—8"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyAxcelis NV GSD HE
Specifications
ConfigurationP4 Magnet Assy, IMP[1]Refurbished[2]
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Wafer size—Wafer can be converted back to 8"[2]
High level of safety—No stored H2, but on demand instant generation[2]
Serial number—090084[4]
Manufacturing year—2000[4]
Refurbishment—Refurbished[2]
Replacement—Both front and rear Cyro pumps by the OEM[2]
Upgrade—A low pressure H2 upgrade was performed[2]
System configuration—End station, disk module, final energy magnet, linac module, gas box, source[3]
Power supply—High voltage power supply[2]
Terminal power supplies—Filament, bias, arc, magnet, source magnet[2]
Vacuum pumps—Both front and rear Cryo pumps by the OEM[2]
Gas delivery—All gas box elements[2]
Ion source—Two new SAC IHC ion sources[2]
Chamber configuration—1 Chamber, 1 Load Port[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]limitekltd.comlimitekltd.com