Waferpedia

Comparison ledger

0010-14300 Magnet AssyversusPI 9500 Ion

Applied Materials 0010-14300 Magnet Assy, Applied Materials PI 9500 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
PI 9500 IonApplied Materials
OEMApplied MaterialsApplied Materials
CategoryIon ImplantationIon Implantation
Wafer size—Wafer Loader Blade Control PCB
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyApplied Materials PI 9500
Specifications
ConfigurationP4 Magnet Assy, IMP[1]Belt Drive[2]
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Frequency—60 Hz[2]
Utilities—Top feed[2]
Water fittings—Imperial[2]
Remote distance—6m umbilical[2]
Layout—Thru wall[2]
Wafer cassette—26 wafers[2]
Helium line length—15 m[2]
Factory interface—SECS / GEM[2]
Tilt angle—Variable 0-7 degree[2]
Plasma Flood System—HDPFS[2]
Beamline—Standard[2]
Source type—Bernas[2]
Front plate—Tungsten[2]
Extraction type—Single bellows[2]
Make—Applied Materials[2]
Model—PI 9500[2]
Equipment type—Ion Implanter[2]
Wafer Sizes—6 inch[2]
Drive—Belt Drive[2]
Pumps—Leybold Turbo pumps; Ebara A07V Mech pump; CTI Cryo pump[2]
Standard wheel—25 wfr wheel[2]
Source chamber liners—Included[2]
MRS Chamber Liners—Included[2]
Gas position 1—Boron (gas module missing)[2]
Gas position 2—n/a (gas module missing)[2]
Gas position 3—Phosphine[2]
Gas position 4—Arsine[2]
Wafer size—Wafer Loader Blade Control PCB[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing