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Comparison ledger

0010-14300 Magnet Assyversus9500 XR

Applied Materials 0010-14300 Magnet Assy, Applied Materials 9500 XR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-14300 Magnet AssyApplied Materials
9500 XRApplied Materials
OEMApplied MaterialsApplied Materials
CategoryIon ImplantationIon Implantation
Wafer size—Wafer on Gripper Sensor
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-14300 Magnet AssyApplied Materials PI 9500
Specifications
ConfigurationP4 Magnet Assy, IMP[1]50/60 Hz[2]
Gearbox P/N0010-27417[1]—
Part Number0010-14300[1]—
DescriptionP4 Magnet Assy, IMP[1]—
Voltage—208 V[2]
Phase—3 phase + Neurtal[2]
Circuit Breaker—250 A[2]
Interrupt Capacity—65000 A[2]
CPU—162 031[2]
Software—4.09[2]
Chamber—CT 10 Cryos[2]
Source Turbo—STP 1000 C[2]
Mrs Turbo—STP 400[2]
Source Backing—QDP 40[2]
Wafer Loader—QDP 80[2]
Wafer size—Wafer on Gripper Sensor[2]
Wheel—Direct Drive[2]
Tilt—0 to 7[2]
BF3—SDS[2]
Manufacturer—Applied Materials[2]
Model—9500 XR[2]
Category—Ion Implantation[3]
Wafer size / configuration—Wafer on Gripper Sensor[3]
Frequency—50/60 Hz[2]
Orient—Flat Not Found Sensor[2]
Gripper—Wafer on Gripper Sensor[2]
Gas Box—BF3, PH3, AsH3[2]
Source Type—IHC Enlarged Chamber[2]
Oven Capabilities—Yes, No ovens fitted to source[2]
Source Magnet—5A[2]
Dual Extraction—Bellows, 60 kV, 160 kV max[2]
Post Acell—Total Energy: 200 kV Max[2]
Plasma Flood Gun—Standard[2]
PH3—SDS[2]
AsH3—SDS[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com