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0010-13627 High Efficiency RF MatchversusHX 500 Chiller

Applied Materials 0010-13627 High Efficiency RF Match, Neslab HX 500 Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNeslab
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchNeslab HX 500 Chiller
Specifications
ConfigurationHE, BIAS[1]440-480V[2]
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]—
Pump Type—CP-55[2]
Controller—Digital, non bath[2]
Frequency—60Hz[2]
Phase—3 Phase[2]
Refrigerant—R-22[2]
Make—Neslab[2]
Model—HX 500[2]
Power—440-480V[2]
Temperature range—5°C to 35°C[3]
Stability—± 0.1°C[3]
Condenser—air or water cooled[3]
Reservoir size—28 gallons / 106 liters[3]
Cooling capacity at 60 Hz and 20°C—15,700 watts[3]
Cooling capacity at 50 Hz and 20°C—13,030 watts[3]
Pump performance at 60 Hz, Pump 1—23 gpm at 50 psig (TU 9)[3]
Pump performance at 60 Hz, Pump 2—19 gpm at 50 psig (CP 75)[3]
Pump performance at 50 Hz, Pump 1—16 gpm at 50 psig (TU 9)[3]
Pump performance at 50 Hz, Pump 2—10 gpm at 40 psig (CP 75)[3]
Power requirements at 60 Hz—208-230V 3ø / 460V 3ø[3]
Power requirements at 50 Hz—380-415V 3ø[3]
Unit dimensions (H x W x D)—51.625 x 46 x 28.75 in / 131.1 x 116.8 x 73 cm[3]
Plumbing connections, inlet/outlet process—1 in. FNPT[3]
Plumbing connections, inlet/outlet facility—1 in. FNPT[3]
Plumbing connection, drain—1/2 in. FNPT[3]
Plumbing connection, auto refill—3/8 in. OD SS barb[3]
Unit weight—746 lb / 338.4 kg[3]
Applications—Lasers, process cooling, MRI, medical lasers, linear accelerators, diffusion pumps, vacuum systems, plasma etch equipment[4]
Equipment type—Environmental[5]
Cooling type—Water cooled chiller[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]industrial-stores.comindustrial-stores.com
  4. [4]chillercity.comchillercity.com
  5. [5]jmind.comjmind.com
  6. [6]waferpedia.comwaferpedia.com