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0010-13627 High Efficiency RF MatchversusTSA 101 S W Thermal Shock

Applied Materials 0010-13627 High Efficiency RF Match, ESPEC TSA 101 S W Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsESPEC
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchESPEC TSA
Specifications
ConfigurationHE, BIAS[1]—
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]—
Phase—AC 200V, Phase 3[2]
Refrigeration Motor—5.5Kw[2]
Heater—6Kw[2]
50/60Hz, Max—80Amps[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing