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Comparison ledger

0010-13622 RF Match forversusPlasmalab 800 Plus

Applied Materials 0010-13622 RF Match for, Oxford Instruments Plasmalab 800 Plus, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Plasmalab 800 PlusOxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forOxford Instruments Plasmalab 800
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]Nitride[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Voltage—208 V[3]
Frequency—60 Hz[3]
Phase—3+ Neutral / earth[3]
Type—PECVD (plasma-enhanced chemical vapor deposition) system[3]
Process—Chemical vapor deposition[2]
Configuration / option—Nitride[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com