Waferpedia

Comparison ledger

0010-13622 RF Match forversusDesktop Pro

Applied Materials 0010-13622 RF Match for, Denton Vacuum Desktop Pro, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Desktop ProDenton Vacuum
OEMApplied MaterialsDenton Vacuum
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forDenton Vacuum Desktop Pro
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]50/60 Hz[2]
Model0010-13622[1]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Voltage—208 VAC[2]
Process type—Magnetron sputtering[3]
Deposition mode—DC & RF sputtering[3]
Substrate size—4-inch diameter[3]
Footprint—Less than 36 inches (914 mm) of desk space[3]
Vacuum capability—High vacuum, 10^-6 torr range[3]
Pump-down time—Less than 30 minutes[3]
Cathodes—Up to two 2.0-inch diameter magnetrons[4]
Substrate stage—Rotating substrate stage[3]
Applications—Sputtering, materials research, product QC & QA, semiconductor failure analysis, nanotechnology, compound semiconductors[3]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]dentonvacuum.comdentonvacuum.com
  4. [4]info.dentonvacuum.cominfo.dentonvacuum.com