Waferpedia

Comparison ledger

0010-13622 RF Match forversusProducer SE

Applied Materials 0010-13622 RF Match for, Applied Materials Producer SE, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
Producer SEApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2006 Vintage · 2008 Vintage
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forApplied Materials Producer
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[1]Chambers:[2]
Model0010-13622[1]Producer SE[2]
Product TypeRF Match for PVD (Physical Vapor Deposition)[1]—
FeatureHigh Efficiency HE RF Match-Bias[1]—
Phase—3 Phase[5]
Wafer Size—12 inch (300mm)[2]
Process Type—PECVD (Plasma-Enhanced Chemical Vapor Deposition)[2]
Chamber Configuration (PECVD)—A: PECVD APE, B: PECVD TEOS, C: PECVD BLOK[2]
Chamber Configuration (CVD)—ACL (2CH) – two chambers[3]
Electrical Requirements—3 Phase, 4 Wire, 50/60 Hz[5]
Vintage Year—2006[3]
Process type—CVD[3]
Process type variant—PECVD[2]
Chamber configuration—Chamber A: PECVD APE; Chamber B: PECVD TEOS; Chamber C: PECVD BLOK[2]
Vintage—2006, 2007, 2008[3]
Chamber types (PECVD)—APE, TEOS, BLOK[2]
Manufacturing vintage—2006/2007[3]
Electrical—3 phase, 4 wire, 50/60 Hz[5]
OEM—Applied Materials[2]
Wafer size—12 inch[6]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]Equipment inventory listing