Comparison ledger
Applied Materials 0010-13622 RF Match for, Applied Materials Endura CL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | Endura CLApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Applied Materials Endura |
| Cited variants | — | |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[4] | Preclean[1] |
| Model | 0010-13622[4] | Endura CL[1] |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[4] | — |
| Feature | High Efficiency HE RF Match-Bias[4] | — |
| Phase | — | 3 Phase[5] |
| Voltage | — | 400V[5] |
| Chamber E | — | Degas[5] |
| Chamber F | — | Degas[5] |
| SUB Rack | — | BULE Distribution Rack[5] |
| Chamber | — | D (PC-XT), 1 (IMP), 2/3 (TxZ)[6] |
| OEM | — | Applied Materials[1] |
| Equipment type | — | Chamber[1] |
| Chamber configuration | — | Preclean[1] |
| Vintage | — | 2002[1] |
| Make | — | Applied Materials[1] |
| Product detail | — | Preclean 2002 Vintage[1] |
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