Waferpedia

Comparison ledger

0010-03254 E Chuckversus8070-0102-01 X 7702 Stage

Applied Materials 0010-03254 E Chuck, Zygo 8070-0102-01 X 7702 Stage, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsZygo
Category——
Wafer size——
Process node——
Introduced——
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Family—Zygo 8070-0102-01 X 7702 Stage
Specifications
Configuration—Compatible with Canon FPA 2500, FPA 3000, FPS 5550 iZ Part Number: BG 4 5372 020[1]
OEM—Zygo[1]
Model—8070-0102-01 X / 7702 Stage[1]
Product name—Zygo 8070-0102-01 X / 7702 Stage Laser[1]
Compatibility—Canon FPA 2500, FPA 3000, FPS 5550[1]
iZ part number—BG 4 5372 020[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing