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0010-03254 E ChuckversusAlcatel ADP 122 P Dry

Applied Materials 0010-03254 E Chuck, Pfeiffer Alcatel ADP 122 P Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
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Family—Pfeiffer Alcatel ADP 122
Specifications
Voltage—200 V ~ 208 V[1]
Peak Pumping Speed—95 m³/h (50 Hz), 112 m³/h (60 Hz)[2]
Ultimate Pressure—3.0×10⁻² mbar (50 Hz), 1.5×10⁻² mbar (60 Hz)[2]
Water Cooling Flow—1.5 L/h[2]
Power Supply Voltages—200, 240, 380, 415 V (50 Hz); 200, 240, 380, 480 V (60 Hz)[2]
Inlet Port—NW 50[2]
Exhaust Port—NW 40[2]
Weight—400 lbs[2]
Width (Series 2)—390 mm[3]
Voltage (specific configuration)—200–208 V[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]ajvs.comajvs.com
  3. [3]ajvs.comajvs.com