Comparison ledger
Applied Materials 0010-03254 E Chuck, Leybold Turbovac 1000 C Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Leybold |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Leybold Turbovac 1000 C Turbomolecular Vacuum |
| Specifications | ||
| Power In | — | 47V, AC 3,5A, 600 Hz[1] |
| Power Out | — | 36.000 min-1[1] |
| Frequency | — | 600 Hz[2] |
| Pumping Speed | — | 1000 L/s for N2[2] |
| Compression Ratio | — | > 10ª for N2 / H2[2] |
| Inlet Flange | — | ISO-160 / ISO-200 KF[2] |
| Foreline Flange | — | KF-25 or KF-40[2] |
| Operating Speed | — | ~ 36 000 rpm[2] |
| Cooling | — | water[2] |
| Pumping speed | — | 1000 L/s (N2)[2] |
| Compression ratio | — | > 10ª for N2 / H2[2] |
| Power input | — | 47V AC, 3.5A, 600 Hz[1] |
| Power output | — | 36,000 min-1[1] |