Waferpedia

Comparison ledger

0010-03254 E ChuckversusSEZ DV Prime

Applied Materials 0010-03254 E Chuck, Lam Research SEZ DV Prime, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
SEZ DV PrimeLam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Lam Research SEZ
Cited variants—
  • Lam / SEZ DV Prime Wet Station, 12"[1]
Specifications
Configuration—Chambers (8)[2]
Make / OEM—Lam / SEZ[2]
Model—DV Prime[2]
Equipment type—Wet station[2]
Wafer size—12 inch[2]
Chambers—8[2]
Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing