Waferpedia

Comparison ledger

0010-03254 E ChuckversusAlliance A 6 9400 DSIE III Process

Applied Materials 0010-03254 E Chuck, Lam Research Alliance A 6 9400 DSIE III Process, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2015 Refurbishment
Control system——
Generation——
Family—Lam Research Alliance
Specifications
Configuration—50/60 Hz[1]
Voltage—208Vac[1]
Full Load Current—43 amps[1]
Phase—3 Phase[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing