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0010-03254 E ChuckversusRS 35 Sheet Resistance Measurement

Applied Materials 0010-03254 E Chuck, KLA RS 35 Sheet Resistance Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
RS 35 Sheet Resistance MeasurementKLA
OEMApplied MaterialsKLA
Category——
Wafer size—One wafer manual loader
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—KLA RS 35
Cited variants—
  • RS 35 C Sheet Resistance Measurement[1]
Specifications
Wafer size—One wafer manual loader[2]
Configuration—Scan stage[2]
Process vac—23 InHg[2]
CDA—100 PSI[2]
Inlet Power—1 line of 115 vac, 8 amp[2]
Wafer Size—6 inch[2]
Wafer Handling—One wafer manual loader[2]
Scan Stage—Yes[2]
Process Vacuum—23 InHg[2]
0010-03254 E Chuck entryRS 35 Sheet Resistance Measurement entryAsk about these tools →Share experience with this comparison →
Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing