Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards IGX 100 M, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | IGX 100 MEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards IGX 100 M |
| Cited variants | — | |
| Specifications | ||
| Peak pumping speed | — | 105 m³/h (62 cfm, 1750 l/min)[2] |
| Ultimate pressure | — | 5.00E-03 mbar (3.75E-03 Torr, 0.50 Pa)[2] |
| Power at 700 Torr exhaust | — | 1 kW[2] |
| AUC (Active Utility Control) power | — | 0.05 kW[2] |
| Water inlet flow | — | 1 slm (requires constant flow valve accessory)[2] |
| Nitrogen purge flow | — | 4 or 14 slm[2] |
| Footprint (excluding exhaust) | — | 0.20 m²[2] |
| Weight | — | 120 kg (264.5 lbs)[2] |
| Inlet connection | — | ISO63[2] |
| Outlet connection | — | NW25[2] |
| Noise at ultimate | — | < 55 dB(A)[2] |
| Input voltage options | — | 200–230 V and 380–460 V, 50/60 Hz, 3-phase[1] |
| Part number (200–230 V) | — | A54612958[1] |
| Part number (380–460 V) | — | A54612959[1] |
| SS variant part number (200–230 V) | — | A53612958[2] |