Waferpedia

Comparison ledger

0010-03254 E Chuckversus100 Spinner

Applied Materials 0010-03254 E Chuck, CEE 100 Spinner, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsCEE
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—CEE 100 Spinner
Specifications
Spin Speed Range—1 to 6000 RPM[1]
Acceleration Range—1 to 30000 RPM/s[1]
Step Time Range—1 to 999 seconds[1]
Programmable Presets—10[2]
Steps per Program—Up to 10 steps[2]
Wafer Size—Up to 6 inches (152.4 mm)[2]
Available Spin Chucks—2.25 inches (57.2 mm) and 0.3125 inches (7.9 mm)[1]
Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.ku.edunanofab.ku.edu
  2. [2]nanofab.utah.edunanofab.utah.edu