Waferpedia

Comparison ledger

NT-80versus0010-13622 RF Match for

AJA NT-80, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMAJAApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAJA NT-80Applied Materials 0010-13622 RF Match for
Specifications
seriesNautilus Series Rotating Magnetron[1]—
magnet arrayconfigurable magnet array[1]—
optimization capabilityoptimize target utilization, uniformity, or intentional non-uniformity[1]—
co-deposition useused with segmented, multi-material targets depositing onto spinning substrates for direct, variable co-depositions from a single magnetron[2]—
TypeNautilus Series Rotating Magnetron[1]—
Configurable magnet arrayAllows optimization of target utilization, uniformity, or intentional non-uniformity[1]—
Application capabilityUsed with segmented, multi-material targets depositing onto spinning substrates for co-deposition tests[1]—
Configuration—High Efficiency HE RF Match-Bias[3]
Model—0010-13622[3]
Product Type—RF Match for PVD (Physical Vapor Deposition)[3]
Feature—High Efficiency HE RF Match-Bias[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing