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Comparison ledger

350 Dversus160 XP Ion

Agilent 350 D, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
350 DAgilent
OEMAgilentVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 350Varian 160 XP Ion
Specifications
ConfigurationHas run 100mm[1]150mm High Current IMP[4]
CategoryIon Implantation[2]—
Wafer size150 mm[3]—
Machine typeHigh Current Ion Implanter[3]—

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com