Waferpedia

Comparison ledger

11980 A Fiber OpticversusOTFC 1300 Optical

Agilent 11980 A Fiber Optic, Optorun OTFC 1300 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAgilentOptorun
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 A Fiber OpticOptorun OTFC 1300
Cited variants—
  • OTFC-1300CBI/DBI[1]
  • OTFC-1300 or OTFC-1550[2]
Specifications
Configuration1250-1600nm[3]Windows 10 Pro[4]
Wavelength Range1250-1600nm[3]—
OEM—Optorun[4]
Model—OTFC 1300[4]
Equipment type—Optical Coater[4]
Series—OTFC series[1]
Technology—ion-assisted technology[1]
Applications—AR coatings; optical filters such as edge filters and band pass filters[1]
Vacuum chamber—SUS304, φ1300mm×1610mm (H)[1]
Substrate dome size—φ1130mm[1]
Substrate dome rotation speed—10 rpm to 50 rpm (variable)[1]
Optical film thickness control system—HOM2-R-VIS350A High-precision Optical Monitor[1]
Wavelength range—350nm to 1100nm[1]
Crystal film thickness monitor—XTC/3 plus 6-point rotary sensor[1]
Evaporation source—EB source: 2 units[1]
Ion source—17 cm RF ion source[1]
Vacuum system—Roughing Pump, 2 Diffusion Pumps + Polycold or 2 Cryo Pumps + Cryo Trap[1]
Ultimate pressure—7.0×10^-5 Pa or lower[1]
Pump down rate—15 minutes (Atm. to 1.3×10^-3 Pa)[1]
Substrate heater—350℃ (max.)[1]
Dimensions—5000mm (W)×6500mm (D)×3500mm (H) approx.[1]
Power requirements—3-phase, 200V, 50/60Hz, 100kVA approx.[1]
Cooling water flow rate—140ℓ/min. or greater[1]
Compressed air pressure—0.5MPa or higher[1]
Gross weight—8500kg approx.[1]
Control system—Windows 10 Pro[4]
Included component—Brooks Polycold[4]

Plan your fab

Building a Precision Optics process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]allwin21.comallwin21.com
  2. [2]dynamicmos.comdynamicmos.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing