Waferpedia

Comparison ledger

7120 MD Dicingversus3220

ADT 7120 MD Dicing, Disco 3220, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
3220Disco
OEMADTDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyADT 7120 MD DicingDisco 3220
Specifications
Wafer size8 inch[1]—
equipment type—dicing saw[2]
Workplace size—ø150 mm[3]
Spindle layout—Single[3]
Spindle output—1.5 kW at 30,000 min-1[3]
Spindle max revolution speed—40,000 min-1[3]
X-axis feed speed range—0.1 – 500 mm/s[3]
Y-axis index step—0.0001 mm[3]
Z-axis repeating accuracy—0.001 mm[3]
Z-axis max blade size—ø58 mm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]semistarcorp.comsemistarcorp.com