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-407B-2-S-CE-S293 RobotversusLabspin 6 Photoresist Spinner

ABM -407B-2-S-CE-S293 Robot, SUSS MicroTec Labspin 6 Photoresist Spinner, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
-407B-2-S-CE-S293 RobotABM
Labspin 6 Photoresist SpinnerSUSS MicroTec
OEMABMSUSS MicroTec
Category——
Wafer size——
Process node——
Introduced——
Production run——
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FamilyABM -407B-2-S-CE-S293 RobotSUSS MicroTec Labspin 6 Photoresist Spinner
Cited variants—
  • LabSpin6 TT (Table-Top)[1]
  • LabSpin6 BM (Bench-Mounted)[1]
Specifications
ModelABM-407B-2-S-CE-S293[2]Labspin 6[3]
DescriptionROBOT[2]—
Refurbished RTP RTAAG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2]—
KLA-Tencor Spare Parts and ServiceRS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2]—
Refurbished Isotropic Plasma EtcherMatrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2]—
Refurbished PECVD, ALD EquipmentCambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2]—
Refurbished Mask AlignerCanon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2]—
Refurbished BondingSUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2]—
Refurbished Wafer ProberElectroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2]—
Maker—SUSS[3]
Equipment type—Photoresist Spinner[3]
Process type—manual coater/developer[1]
Applications—laboratory and R&D[1]
Supported wafer sizes—4 inch, 6 inch[3]
LabSpin6 substrate size—up to 150 mm round or 4" square substrates[1]
Max spin speed—8,000 rpm +/- 1 rpm (with 200 mm chuck)[1]
Max acceleration—4,000 rpm/s[1]
Recipes—200 max[1]
Process steps—40 max[1]
Programmable step time—1-999 s[1]
Controller—touch panel with color display[1]
-407B-2-S-CE-S293 Robot entryLabspin 6 Photoresist Spinner entryAsk about these tools →Share experience with this comparison →
Sources (3)Every fact above is drawn from these public sources
  1. [1]coltronics.com.aucoltronics.com.au
  2. [2]dealer listingsemistarcorp.com
  3. [3]Equipment inventory listing