Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Nordson Stratosphere Plasma Treatment, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Nordson |
| Category | — | — |
| Wafer size | — | Wafer kit sensor |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Nordson Stratosphere Plasma Treatment |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | Stratosphere[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Configuration | — | E-FEM, 300mm FOUP (2), ESD[2] |
| Wafer size | — | Wafer kit sensor[2] |
| Manufacturer | — | Nordson[2] |
| Tool family | — | Nordson Stratosphere Plasma Treatment[3] |
| Equipment type | — | Plasma Treatment System[2] |
| Process type | — | Parallel plate asher[2] |
| RF power range | — | 600 to 1000 W[2] |
| Chiller | — | Assy, Chiller, 1HP, 230V/60, 1/4"[2] |
| Vacuum | — | 16 CFM standard dry pump[2] |
| Gas delivery | — | 100 sccm MFC[2] |
| Wafer handling | — | Wafer kit sensor[4] |
| Wafer size kit | — | Wafer kit, 200/300mm hybrid[2] |
| Electrode water cooling | — | Included[2] |
| Electrode temperature sensor | — | F 3 electrode temperature sensor[2] |