Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Nikon VMR 3020 Dimensional Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Nikon |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Nikon VMR 3020 Dimensional Measurement |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Type | — | Single-column X-Y stage type[2] |
| Main unit dimensions (W x D x H) | — | 625 x 728 x 1195 mm[2] |
| Controller dimensions (W x D x H) | — | 250 x 524 x 567 mm[2] |
| Joystick box dimensions (W x D x H) | — | 100 x 181 x 98 mm[2] |
| Measurement stand dimensions (W x D x H) | — | 690 x 730 x 510 mm[2] |
| Effective stroke (X-Y stage) | — | 300 x 200 mm[2] |
| Stage surface size | — | 480 x 356 mm[2] |
| Stage glass size | — | 355 x 230 mm[2] |
| Workpiece mass for precision guarantee | — | 5 kg[2] |
| Workpiece mass for load bearing capacity guarantee | — | 20 kg[2] |
| Maximum permissible mass on stage glass | — | 20 kg[2] |
| Input voltage | — | 100-120 V ±10% or 220-240 V ±10% (auto-switching)[2] |