Comparison ledger
ABM -407B-1-S-CES293 Robot, Ultron UH 104 12 UV, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UH 104 12 UVUltron | |
|---|---|---|
| OEM | ABM | Ultron |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Ultron UH 104 12 UV |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | UH 104 12[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Make | — | Ultron[3] |
| System type | — | UV curing system[3] |
| Line designation | — | UH104-8/UH104-12[1] |
| Curing process | — | Cool, low-temperature UVA 365nm[1] |
| UV lamp | — | Environmentally safe, ozone-free UV lamp array[1] |
| Wafer capacity | — | Up to 300mm frame-mounted wafer[1] |
| Controller | — | Easily programmable microprocessor-based controller[1] |
| Operation | — | Repeatable, reliable, single-frame, manual operation[1] |
| Workstage | — | Optional motorized, rotating workstage[1] |
| Dimensions (UH104-12 height) | — | 11-1/8"[1] |
| Dimensions (UH104-12 width) | — | 25-1/8"[1] |
| Dimensions (UH104-12 depth) | — | 25-3/16"[1] |