Comparison ledger
ABM -407B-1-S-CES293 Robot, Nikon VMZ R 3020 CNC Video Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Nikon |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Nikon VMZ R 3020 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Stroke (X x Y x Z) | — | 300 x 200 x 200 mm[2] |
| Configuration | — | Measurement Accuracy:[2] |
| Auto Focus | — | Laser AF, Image AF (* If Type A selected, Laser AF is optional)[2] |
| Illumination | — | Diascopic, Episcopic, 8-segment LED ring illumination (3 incident angles)[2] |
| CCD Camera | — | B&W 1/3 CCD·Color 1/3 CCD (Color: type 1, 2 and A only)[2] |
| Type 1 | — | 0.5 - 7.5x · 9.33 x 7 - 0.622 x 0.467 mm[2] |
| Type 2 | — | 1 - 15x · 4.67 x 3.5 - 0.311 x 0.233 mm[2] |
| Type 3 | — | 2 - 30x · 2.33 x 1.75 - 0.155 x 0.117 mm[2] |
| Type 4 | — | 4 - 60x · 1.17 x 0.875 - 0.07 x 0.068 mm[2] |
| Type TZ | — | 1 - 120x · 4.67 x 3.5 - 0.039 x 0.029 mm[2] |
| Type A | — | 0.35 - 3.5x · 13.3 x 10 - 1.33 x 1 mm[2] |
| Guaranteed Loading Capacity (Weight) | — | 20 kg[2] |
| Power Source | — | AC100 - 240V, 50 / 60Hz[2] |
| Power Consumption | — | 5-2.5A[2] |
| Measurement Accuracy (XY 1 axis) | — | 1.2 + 4L / 1000μm[2] |
| Measurement Accuracy (XY 2 axis) | — | 2.0 + 4L / 1000μm[2] |
| Measurement Accuracy (Z axis) | — | 1.2 + 5L / 1000μm[2] |
| Magnification / Field of View - Type 1 | — | 0.5 - 7.5x · 9.33 x 7 - 0.622 x 0.467 mm[2] |
| Magnification / Field of View - Type 2 | — | 1 - 15x · 4.67 x 3.5 - 0.311 x 0.233 mm[2] |
| Magnification / Field of View - Type 3 | — | 2 - 30x · 2.33 x 1.75 - 0.155 x 0.117 mm[2] |
| Magnification / Field of View - Type 4 | — | 4 - 60x · 1.17 x 0.875 - 0.07 x 0.068 mm[2] |
| Magnification / Field of View - Type TZ | — | 1 - 120x · 4.67 x 3.5 - 0.039 x 0.029 mm[2] |
| Magnification / Field of View - Type A | — | 0.35 - 3.5x · 13.3 x 10 - 1.33 x 1 mm[2] |