Comparison ledger
ABM -407B-1-S-CES293 Robot, Laurell WS-650-23 B Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WS-650-23 B SpinLaurell | |
|---|---|---|
| OEM | ABM | Laurell |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Laurell WS-650-23 B Spin |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Maximum Substrate Size | — | ø150 mm wafers; 5" × 5" (127 mm × 127 mm) substrates[2] |
| Maximum Rotational Speed | — | 12,000 RPM (based on a ø100 mm silicon wafer)[2] |
| Process Controller | — | 650-series microprocessor controller with PC software support (Spin 3000); real-time interaction, pausing, stopping, and continuation[2] |
| Power Requirements | — | 95 to 240 VAC, 47/63 Hz, ~300 W[2] |
| Vacuum Requirements | — | 25–28 inHg (635–711 mm Hg) with flow 4.5 SCFM (0.127 m³/min) at 0 inHg[2] |
| Nitrogen Purge Pressure | — | 60–70 PSIG (4–5 bar) of N₂ or CDA; consumption 3 ft³/h (0.085 m³/h) for standard motor, 20 ft³/h (0.566 m³/h) for high-performance motor[2] |
| Housing Material | — | Solid co-polymer blend (proprietary); optional PTFE (Hostaflon TFM-1600 / Teflon AF) for high-temperature chemistry[2] |
| Safety Certifications | — | ETL, UL, CSA, CE, RoHS compliant; door interlock, vacuum interlock, lid interlock[2] |