Comparison ledger
ABM -407B-1-S-CES293 Robot, Espec PR-1J Temperature & Humidity, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Espec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Espec PR-1J Temperature & Humidity |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Year of Manufacture | — | 2022[2] |
| Observation Window | — | Yes[2] |
| Temperature Range | — | -20 to 100°C[2] |
| Humidity Range | — | 20 to 98% RH[2] |
| Cable Port | — | Φ50mm x 1 (Left side)[2] |
| Internal Dimensions | — | W500 x H600 x D400 mm[2] |
| Casters | — | Yes[2] |
| External Dimensions | — | W910 x H1440 x D873 mm[2] |
| Communication | — | GPIB, Ethernet[2] |
| Weight | — | Approx. 260 kg[2] |
| Recorder | — | None[2] |
| Power Supply | — | AC200V 3-Phase 50/60Hz (Max 18.5A)[2] |
| Programming Function | — | Yes[2] |
| Operating Hours | — | Approx. 22,400 hours[2] |
| Capacity | — | 120 L[3] |
| Control System | — | Balanced Temperature and Humidity Control (BTHC)[3] |
| Heat Up Rate | — | 3.0 °C/min[3] |
| Pull Down Rate | — | 2.0 °C/min[3] |
| Allowable Heat Load | — | 800 W[3] |
| Communication Interfaces | — | GPIB, Ethernet[2] |
| Shelves | — | 2[2] |