Comparison ledger
ABM -407B-1-S-CES293 Robot, ESPEC BTX-475, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | BTX-475ESPEC | |
|---|---|---|
| OEM | ABM | ESPEC |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | ESPEC BTX-475 |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Documentation | — | Datasheet (1 document)[2] |
| Interior Volume | — | 4 cu. ft. (110 L)[3] |
| Interior Dimensions (W x D x H) | — | 19.6" x 15" x 23.6" (500 x 380 x 600 mm)[3] |
| Exterior Dimensions (W x D x H) | — | 30.25" x 33.5" x 46" (770 x 850 x 1170 mm)[3] |
| Temperature Range | — | -70 to 180 °C (-94 to 354 °F)[3] |
| Humidity Range | — | 10% - 95% RH[3] |
| Average Heating Rate | — | 2.75 °C/min (empty, per IEC 60068 3-5, at supply sensor)[3] |
| Average Cooling Rate | — | 2.5 °C/min (empty, per IEC 60068 3-5, at supply sensor)[3] |
| Power Requirement | — | 208/230 V, 1ph, 60 Hz, 20 service amps (NEMA 6-20 plug)[3] |
| Temperature Fluctuation | — | ±0.5 °C (at control sensor)[3] |
| Humidity Fluctuation | — | ±5% (at control sensor)[3] |
| Temperature Gradient (Uniformity) | — | ±1.5 °C (below 100 °C, empty)[3] |
| Humidity Gradient (Uniformity) | — | ±5% (empty)[3] |
| Weight | — | Approx. 500 lbs (227 kg)[4] |