Comparison ledger
ABM -407B-1-S-CES293 Robot, Advanced Energy MDX-10K, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MDX-10KAdvanced Energy | |
|---|---|---|
| OEM | ABM | Advanced Energy |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Advanced Energy MDX-10K |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[4] | MDX-10K[1] |
| Description | ROBOT[4] | RF GENERATOR[1] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[4] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[4] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[4] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[4] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[4] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[4] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[4] | — |
| Part Number | — | 3152313-000AB[1] |
| Model Number | — | 2012-043-R[2] |
| Manufacturer | — | Advanced Energy[1] |
| Version | — | Spares[1] |
| Quantity | — | 1[1] |
| Sales Condition | — | as is where is[1] |
| Power | — | 10 kW[5] |
| Type | — | DC magnetron power supply[5] |
| Applications | — | thin film deposition and sputtering[5] |
| Output Power | — | 10 kW[5] |
| Regulation Modes | — | Power, Current, Voltage[5] |
| Regulation Accuracy | — | 0.25% in all modes[5] |
| Ripple | — | 1% RMS at 100 kHz[5] |
| Ignition Voltage | — | 1550 V[5] |
| Response Time | — | 5 µs to plasma load changes[5] |
| Ramp Timer | — | 0 to 99.0 minutes, programmable[5] |
| Run Timer | — | Continuous or 0 to 99.0 minutes, programmable[5] |
| Voltage Configuration Standard Z Taps | — | 500–600 V, 600–800 V, 800–1000 V[5] |
| Voltage Configuration Low Z Taps | — | 400–500 V, 500–640 V, 640–800 V[5] |
| Voltage Configuration High Z Taps | — | 600–775 V, 775–1000 V, 1000–1250 V[5] |
| Input Voltage | — | 208 V ± 10%, 380 V ± 10%, 415 V ± 10% (3-phase, 50/60 Hz)[5] |
| Input Current | — | 34 A[5] |
| Weight | — | 71 lb[5] |
| Cooling | — | Forced-air[5] |
| Standard Z Taps | — | 500–600 V, 600–800 V, 800–1000 V[5] |
| Low Z Taps | — | 400–500 V, 500–640 V, 640–800 V[5] |
| High Z Taps | — | 600–775 V, 775–1000 V, 1000–1250 V[5] |
| Height | — | 25 inches[5] |
| Operating Temperature | — | 0 to 45°C ambient[5] |
| Humidity | — | 92% relative humidity, non-condensing[5] |
| Control Interfaces | — | Front panel, user port (RS-232), analog remote control[5] |
| Analog Control Signals | — | 0–5 V for voltage, current, and power control[5] |
| Interlock Inputs | — | Vacuum, water, system[5] |